AS/NZS ISO 14644.5: 01/06/2006 Cleanrooms and associated controlled environments, Part 5: Operations

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Cleanrooms and associated controlled environments, Part 5: Operations 01/06/2006

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ISBN(s): 0733770886

Adopts of ISO 14644-5:2004 to specify basic requirements for cleanroom operations. It is intended for those planning to use and operate a cleanroom.

Attributes

Edition 1st
Published 01/06/2006
ISBN(s) 0733770886
Number of Pages 44
File Size 1 file, 950 KB
Product Code(s) 10144158, 10144089, 10144137
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