AS ISO 19318-2006

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Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of methods used for charge control and charge correction

Adopts ISO 19318:2004 to specify the minimum amount of information describing the methods of charge control and charge correction in measurements of core-level binding energies for insulating specimens by X-ray photoelectron spectroscopy that shall be reported with the analytical result.

Table of contents
Header
About this publication
Preface
Introduction
1 Scope
2 Normative reference
3 Terms and definitions
4 Symbols and abbreviated terms
5 Apparatus
5.1
5.2
5.3
6 Calibration of binding-energy scale
7 Reporting of information related to charge control
7.1 Methods of charge control
7.2 Information on specimen
7.2.1 Specimen form
7.2.2 Specimen dimensions
7.2.3 Specimen-mounting methods
7.2.4 Specimen treatment prior to or during analysis
7.3 Instrument and operating conditions
7.4 General method for charge control
7.5 Reasons for needing charge control and for choosing the particular method for charge control
7.6 Values of experimental parameters
7.7 Information on the effectiveness of the method of charge control
8 Reporting of method(s) used for charge correction and the value of that correction
8.1 Methods of charge correction
8.2 Approach
8.3 Value of correction energy
Annex A
A.1 Introduction
A.2 Methods of charge control
A.2.1 Damage caution
A.2.2 Electron flood gun [9-12]
A.2.3 Ultraviolet flood lamp [15]
A.2.4 Specimen heating
A.2.5 Electrical connection
A.2.5.1 Grounding and enhanced conduction path
A.2.5.2 Isolation from ground
A.2.5.3 Biasing
A.2.6 Low-energy ion source
A.3 Methods of charge correction
A.3.1 Differential charging
A.3.2 Adventitious-hydrocarbon referencing [5, 9, 15, 19-23]
A.3.2.1
A.3.2.2
A.3.2.3
A.3.2.4
A.3.3 Gold deposition [9, 10, 19, 24-27]
A.3.4 Implantation with inert gases [28]
A.3.5 Internal referencing
A.3.6 Substrate referencing
A.4 Bias referencing [17]
A.4.1
A.4.2
A.5 Auger parameter measurements [32-34]
A.5.1
A.5.2
A.5.3
Bibliography

Cited references in this standard
Content history

[Superseded]

AS ISO 19318-2006 Rec:2016

DR 06452

Please select a variation to view its description.

Published

20/10/2006

Pages

11

Please select a variation to view its pdf.

AS ISO 19318-2006
$109.95