Adopts ISO 14976:1998 to specify a format to transfer data from computer via parallel interfaces or via serial interfaces over direct wire, telephone line, local area network or other communication link.
Table of contents
Header
About this publication
Preface
Introduction
1 Scope
2 Description of the format
2.1 General
2.2 The Components of the metalanguage
2.3 Additional rules
2.4 The format
2.5 Specification of the spectrometer geometry
Annex A
Annex B
B.1 General
B.2 Archetypal applications
B.2.1 An XPS spectrum of one region over 25 eV around the C 1s peak.
B.2.2 An AES depth profile at one point with narrow-scan direct spectra of three elements, the first being oxygen.
B.2.3 Two SIMS maps of elements, setting the mass spectrometer to two discrete settings of mass, the first being 45 amu.
B.2.4 An AES depth profile of differential spectra of three elements, the first being oxygen, at four points on an integrated circuit.
B.2.5 Five SNMS spectral regions of a stainless steel containing tin as a function of ten oxygen exposures.
B.2.6 An AES cyclic sputter depth profile at one point with differential spectrum single values for each of three elements over 1000 depths lasting eight hours.
B.2.7 SIMS Energy spectra 0 to 100 eV of three elements at five positions on an integrated circuit followed over 100 depths in a profile lasting one hour.
B.2.8 Combined AES spectra of three elements and one EDX spectrum for a full map as a function of sputtering depth at 100 depths.
B.2.9 AES x linescan of four elements at peak and background in the direct spectrum mode across an integrated circuit about 2/3 of way down screen.
B.2.10 A correction curve for scaling AES spectra.
B.2.11 A sputter-depth profile following two SIMS intensities, target bias and sputtering-time at irregular intervals.
B.2.12 A ratio scatter diagram in AES for 100 analyses of three elements.
B.3 Annotated examples
B.3.1 Annotation of example in B.2.1
B.3.2 Annotation of example B.2.2
B.3.3 Annotation of example B.2.3
B.3.4 Annotation of example B.2.4
Annex C
C.1 General
C.2 An experiment involving a number of regularly-scanned spectra or spectral regions for one technique as a function of one experimental variable, the analysis not being at a specifically-addressed point on the sample.
C.3 An experiment involving a number of regularly-scanned spectral regions as a function of sputtering as in a sputter depth profile by one technique such as AES or SIMS, the analysis not being at a particularly addressed point on the sample.
C.4 An experiment involving a number of maps of single values representing the intensities of different elements for one technique such as AES, EDX or SIMS, the maps to be made of x-Iinescans starting at (1,1) and varying with one experimental variable.
