AS ISO 14644.3: 05/21/2021 Cleanrooms and associated controlled environments, Part 3: Test methods

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Cleanrooms and associated controlled environments, Part 3: Test methods 05/21/2021

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ISBN(s): 9781761133213

Identically adopts ISO 14644 3:2019, which provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. KEYWORDS: Cleanrooms; Controlled environments; Attributes; Test method

Attributes

Edition 2nd
Published 05/21/2021
ISBN(s) 9781761133213
Number of Pages 53
File Size 1 file, 3.2 MB
Product Code(s) 10270181, 10270182, 10270183
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