Adopts ISO 14644-1:2015 to specify the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones; and separative devices as defined in AS/NZS ISO 14644.7:2006.
Table of contents
Header
About this publication
Preface
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
3.1 General
3.2 Airborne particles
3.3 Occupancy states
3.4 Testing instrumentation (see Annex F)
3.5 Instrument specifications
4 Classification
4.1 Occupancy state(s)
4.2 Particle size(s)
4.3 ISO Class number
4.4 Designation
4.5 Intermediate decimal cleanliness classes and particle size thresholds
5 Demonstration of compliance
5.1 Principle
5.2 Testing
5.3 Airborne particle concentration evaluation
5.4 Test report
Annex A
A.1 Principle
A.2 Apparatus requirements
A.2.1 Particle-counting instrument
A.2.2 Instrument calibration
A.3 Preparation for particle count testing
A.4 Establishment of sampling locations
A.4.1 Deriving the number of sampling locations
A.4.2 Positioning the sampling locations
A.4.3 Sampling locations for large cleanrooms or clean zones
A.4.4 Establishment of single sample volume and sampling time per location
A.5 Sampling procedure
A.5.1
A.5.2
A.5.3
A.5.4
A.5.5
A.5.6
A.6 Processing of results
A.6.1 Recording of results
A.6.1.1 Average concentration of particles at each sampling location
A.6.1.2 Calculate the concentration per cubic metre
A.6.2 Interpretation of results
A.6.2.1 Classification requirements
A.6.2.2 Out-of-specification result
Annex B
B.1 Example 1
B.1.1
B.1.2
B.1.3
B.1.4
B.1.5
B.2 Example 2
B.2.1
B.2.2
B.2.3
B.2.4
B.2.5
B.3 Example 3
B.3.1
B.3.2
B.3.3
B.3.4
B.3.5
B.4 Example 4
B.4.1
B.4.2
B.4.3
B.4.4
B.4.5
B.4.6
B.5 Example 5
B.5.1
B.5.2
B.5.3
B.5.4
B.5.5
B.6 Example 6
B.6.1
B.6.2
B.6.3
B.6.4
B.6.5
Annex C
C.1 Principle
C.2 Consideration of particles larger than 5 µm (macroparticles) — M descriptor
C.2.1 Application
C.2.2 M descriptor format
C.3 Airborne particle count for macroparticles
C.3.1 Principle
C.3.2 General
C.3.3 Sample handling considerations
C.3.4 Measurement methods for macroparticles
C.3.4.1 In situ measurement
C.3.4.2 Collection
C.4 Methods for macroparticle measurement
C.4.1 Macroparticle measurement without particle collection
