AS ISO 14606: 10/20/2006 Surface chemical analysis – Sputter depth profiling – Optimization using layered systems as reference materials

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Surface chemical analysis – Sputter depth profiling – Optimization using layered systems as reference materials 10/20/2006

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ISBN(s): 0733777953

Adopts ISO 14606:2000 to give guidance on the optimization of sputter depth profiling parameters using appropriate single-layered and multi-layered reference materials in order to achieve optimum depth resolution as a function of instrument settings.

Attributes

Edition 1st
Published 10/20/2006
ISBN(s) 0733777953
Number of Pages 15
File Size 1 file, 690 KB
Product Code(s) 10148313, 10148302, 10148310
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