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AS ISO 14237: 10/20/2006 Surface chemical analysis – Secondary-ion mass spectrometry – Determination of boron atomic concentration in silicon using uniformly doped materials

AS ISO 14237: 10/20/2006 Surface chemical analysis – Secondary-ion mass spectrometry – Determination of boron atomic concentration in silicon using uniformly doped materials

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Surface chemical analysis – Secondary-ion mass spectrometry – Determination of boron atomic concentration in silicon using uniformly doped materials 10/20/2006

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ISBN(s): 0733777929

Adopts ISO 14237:2000 to specify a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon, using uniformly doped materials calibrated by a certified reference material implanted with boron.

Attributes

Edition 1st
Published 10/20/2006
ISBN(s) 0733777929
Number of Pages 22
File Size 1 file, 690 KB
Product Code(s) 10103377, 10103364, 10103400
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